isixsigma on MSN
Understanding Process Sigma Level: Level Up Your Process Quality
Six Sigma is a data-driven approach to quality, aimed at reducing variation and the associated defects, wastes, and risks in ...
Asymmetries in wafer map defects are usually treated as random production hardware defects. For example, asymmetric wafer defects can be caused by particles inadvertently deposited on a wafer during ...
Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process
During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...
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