The term nanolithography is derived from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore the literal translation is "tiny writing on rocks".

From materials science to biotechnology, the field of nanotechnology has branched out into various areas of research. Several of these applications are predicated on the capacity to fabricate or ...

Extreme ultraviolet light (EUV light) does not naturally occur on Earth, but it can be produced. In nanolithography machines, EUV light is generated using an immensely hot tin plasma. Researchers at ...

The semiconductor industry has invested huge amounts of money in future lithographic techniques leading to pattern generation with a resolution of only several nanometers. But now, with a few talented ...

(Nanowerk News) Led by Prof. Wei Yayi, a team of researchers from the University of Chinese Academy of Sciences (UCAS) has achieved a significant breakthrough in enhancing the final pattern fidelity ...

Scanning probe microscopy (SPM) is a set of advanced methods for surface analysis. The recent advances in SPM of metals, polymers, insulating, and semiconductive materials are primarily due to the ...

JMAR Technologies Inc. today said its research arm has secured a $34.5 million contract with the Defense Advanced Research Projects Agency (DARPA) that will allow it to advance its research of X-ray ...