The term nanolithography is derived from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore the literal translation is "tiny writing on rocks".

From materials science to biotechnology, the field of nanotechnology has branched out into various areas of research. Several of these applications are predicated on the capacity to fabricate or ...

Extreme ultraviolet light (EUV light) does not naturally occur on Earth, but it can be produced. In nanolithography machines, EUV light is generated using an immensely hot tin plasma. Researchers at ...

Scientists at the Georgia Institute of Technology have developed a new technique for nanolithography that is extremely fast and capable of being used in a range of environments including air (outside ...

A team of 12 Georgetown University professors will be adding a new three-dimensional nanolithography instrument, a tool used to create small structures that are measured in nanometers, to the ...

JMAR Technologies Inc. today said its research arm has secured a $34.5 million contract with the Defense Advanced Research Projects Agency (DARPA) that will allow it to advance its research of X-ray ...

Students at work in RIT’s Center for Nanolithography Research are making big discoveries in a very small world. The researchers have succeeded in producing a 26-nanometer image resolution smaller than ...

Recently, a joint research team from Hangzhou Institute of Technology of Xidian University, Humboldt University and the Max Born Institute announced a breakthrough in fabricating high-precision ...

Scientists in the United Kingdom have made what may be the world's smallest violin, using advanced nanotechnology. The microscopic instrument, measuring 35 by 13 microns, and constructed from platinum ...