Onto Innovation’s Intelligent Line Monitoring & Control with Integrated Metrology offers a new approach to CMP process control. By leveraging data feedforward from standalone metrology tools to ...

Over the past two years, we’ve witnessed digital players entering vertical markets at an astonishing rate, introducing radically new offers, disrupting the ways in which businesses interact with ...

In the manufacturing world, the word “retrofit” many times is feared to mean “lost production.” In other words, plants—or at least parts of plants—must be shut down for equipment to be upgraded. And ...

Chipmakers are relying on machine learning for electroplating and wafer cleaning at leading-edge process nodes, augmenting traditional fault detection/classification and statistical process control in ...

An intelligent manufacturing framework integrates robotics, IoT monitoring, and data analytics to optimize automotive production. The research addresses interoperability, security, and workforce ...